SM5102
2001-2002
Silicon Microstructures, Inc.
♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100
♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com
Die dimensions in mm
CHARACTERISTICS FOR SM5102 - SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min
Typ
Max
Units
Notes
Excitation Voltage
0
5
10
V
1
Excitation Current
0
1.5
3
mA
Span (FS Range)
5 psi
15 psi
30 psi
60 psi
100 psi
300 psi
75
115
130
130
130
130
100
145
165
180
200
220
125
175
195
220
250
275
mV
mV
mV
mV
mV
mV
2
Offset
-50
0
50
mV
TC Span
-24
-19
-15.5
%FS/100
oC3
TC Offset
-7
-1
+7
%FS/100
oC
TC Resistance
24
27.5
33
%/100
oC
Linearity
-0.3
±0.05
0.3
%FS
4
Bridge Impedance
2.70
3.15
4.00
kohm
Proof Pressure
3X
Rated FS
Burst Pressure
5X
Rated FS
Operating Temperature
-40
125
oC
Storage Temperature
-55
150
oC
Notes:
1.
Bridge may be driven with positive or negative voltage
as long as Vsub is not connected. Positive output for positive pressure
applied to circuit side of die when bridge is driven with positive voltage.
2.
Measured at 5V constant voltage excitation.
3.
Measured from 0 to 70 C
4.
Defined as best straight line.
+ Sig
-Sig
+V exc.
-V exc.
-V exc.
Vsub
2.00 mm
1.80 mm
1.38 mm
1.80 mm
Pad size =
0.12 X 0.12 mm
SM5102 die (2 mm square as sawn).
Covered under USA Mask-Copyright and may be covered
under US Patent Numbers 5,812,047 and 6,089,099
See separate Application Notes for typical range of variation in Saw
dimensions.
Positive output for pressure
applied to the top (circuit)
side of the sensor
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Pressure Ranges
PSI
5102
5
005
15
015
30
030
60
060
100
100
300
300
Custom ranges available in high volumes
ORDERING INFORMATION:
Pressure Type
A: Absolute
G: Gage
SM5102- 015 - A
Model Number
Pressure
range
Pressure
Type
Rev 1.2 8_02